2016 Publications
Precursor Dependent Nucleation and Growth of Ruthenium Films During Chemical Vapor Deposition
Journal of Vacuum Science & Technology
2016 Publications
Materials Science of Ru and Ru Alloy Thin Films For Barrier Applications
Interconnect Technology Conference
2016 Publications
Ru Nucleation and Thin Film Smoothness Improvement With Ammonia During Chemical Vapor Deposition
Journal of Vacuum Science & Technology
2015 Publications
Growth of Ultra-Thin Ruthenium and Ruthenium Alloy Films for Copper Barriers
Advanced Metallization Conference
2013 Publications
Effect of CO on Ru Nucleation and Ultra-Smooth Thin Film Growth by Chemical Vapor Deposition at Low Temperature
Chemistry of Materials
2011 Publications
Three-Dimensional Directed Assembly of Block Copolymers Together With Two-Dimensional Square and Rectangular Nanolithography
Advanced Materials
2011 Publications
Domain Orientation and Grain Coarsening in Cylinder-Forming Poly(styrene-B-Methyl Methacrylate) Films
Macromolecules
2010 Publications
Block Cooligomers: A Generalized Approach To Controlling the Wetting Behavior of Block Copolymer Thin Films
Macromolecules